JPS6443352U - - Google Patents
Info
- Publication number
- JPS6443352U JPS6443352U JP1987138902U JP13890287U JPS6443352U JP S6443352 U JPS6443352 U JP S6443352U JP 1987138902 U JP1987138902 U JP 1987138902U JP 13890287 U JP13890287 U JP 13890287U JP S6443352 U JPS6443352 U JP S6443352U
- Authority
- JP
- Japan
- Prior art keywords
- dust removal
- removal device
- patterning
- air outlet
- patterning device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000428 dust Substances 0.000 claims description 7
- 238000000059 patterning Methods 0.000 claims description 5
- 238000007664 blowing Methods 0.000 claims 2
- 239000000839 emulsion Substances 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- 238000009434 installation Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987138902U JPS6443352U (en]) | 1987-09-11 | 1987-09-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987138902U JPS6443352U (en]) | 1987-09-11 | 1987-09-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6443352U true JPS6443352U (en]) | 1989-03-15 |
Family
ID=31401663
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987138902U Pending JPS6443352U (en]) | 1987-09-11 | 1987-09-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6443352U (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5515620A (en) * | 1978-07-20 | 1980-02-02 | Fujitsu Ltd | Washing method |
-
1987
- 1987-09-11 JP JP1987138902U patent/JPS6443352U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5515620A (en) * | 1978-07-20 | 1980-02-02 | Fujitsu Ltd | Washing method |
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